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High Q-Factor Pure Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquids

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Abstract:

We present a design of the pure thickness shear mode film bulk acoustic resonator with high Q-factor working in liquids. The device consists of the c-axis oriented AlN film, the electrodes parallel to the film surface, and the Bragg reflector of SiO2/W. The pure shear mode wave is excited by the lateral electric field. The responses of the device were tested in air and liquids. The results show that the resonance of thickness shear mode wave can be excited near 2 GHz with the Q s of 550 in air. There is no obvious longitudinal resonance in the frequency response due to the weak vertical electric field component generated by the parallel electrodes and the high frequency selectivity of the acoustic reflector. Importantly for the sensor applications, the immersion into de-ionized water and glycerol still allow for the high Q s of 485 and Q p of 467, respectively. The resonance frequencies are decreased in the liquids due to the loading effect on the device surface. This device shows the potential as mass loading sensors for biochemical application.

Keywords: BIOCHEMICAL SENSORS; FILM BULK ACOUSTIC RESONATOR; Q-FACTORS; THICKNESS SHEAR MODE

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/sl.2012.2316

Publication date: January 1, 2012

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