Highly Sensitive Formaldehyde Gas Sensors Based on SnO2–ZnO Nanocomposites

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Abstract:

A highly sensitive formaldehyde (HCHO) gas sensor was fabricated from SnO2–ZnO nanocomposite by sol–gel method on the microelectromechanical system (MEMS) gas sensor platform. SnO2–ZnO composites with different chemical compositions were synthesized and Pd nanoparticles were mixed with the nanocomposites as a catalytic material. The composites were characterized by structural analyses using X-ray diffraction, DSC-TGA, and SEM observation. The SnO2–ZnO nanocomposite system demonstrated high gas sensitivity to HCHO and the Pd nanoparticles served as an excellent support material that further enhanced the selective gas adsorption. In particular, the 1 wt% Pd-mixed SZ3 sensor displayed good HCHO sensitivity (R S = R g /R a , R S = 0.02 at 550 °C), response and recovery times (15 sec and 20 sec). Our synthesis method provided an inexpensive and flexible, wet-chemical route capable of tailoring semiconductor metal oxide nanocomposites for the selective and reproducible detection of HCHO gas at parts per billion levels.

Keywords: FORMALDEHYDE; GAS SENSOR; MEMS; NANOCOMPOSITE; SOL-GEL

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/sl.2012.2314

Publication date: January 1, 2012

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