Improved Hough Transform for Automatic Aspect Ratio Evaluation of 3D Oriented Microstructures

$113.00 plus tax (Refund Policy)

Buy Article:


Aspect Ratio (AR) is one of the critical parameters of 3D microstructures which affects the performance of micro-electromechanical system (MEMS), and therefore should be test and evaluated efficiently for mass production of MEMS. Oriented microstructures such as trenches and channels are those 3D microstructures with special orientations. A key procedure for AR evaluation of oriented microstructures is their orientation detection because their width calculations rely greatly on their orientation determination. Hough transform is an available method to detect orientation of linear structures efficiently and robustly. However based on the existing Hough transform methods, orientation detections are vulnerable to tiny orientation change of the oriented microstructures, which will distorted orientation determination and hence AR evaluation with unexpected error. In this paper, an improved Hough transform using Sub Peak Tracker is developed for efficient and robust orientation detection of oriented microstructures so that accurate AR evaluation can be achieved. Experimental result shows the proposed method is a robust and accurate method for automatic AR evaluation of 3D oriented microstructures.


Document Type: Research Article


Publication date: October 1, 2011

More about this publication?
  • The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • ingentaconnect is not responsible for the content or availability of external websites
Related content



Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more