Aspect Ratio (AR) is one of the critical parameters of 3D microstructures which affects the performance of micro-electromechanical system (MEMS), and therefore should be test and evaluated efficiently for mass production of MEMS. Oriented microstructures such as trenches and channels
are those 3D microstructures with special orientations. A key procedure for AR evaluation of oriented microstructures is their orientation detection because their width calculations rely greatly on their orientation determination. Hough transform is an available method to detect orientation
of linear structures efficiently and robustly. However based on the existing Hough transform methods, orientation detections are vulnerable to tiny orientation change of the oriented microstructures, which will distorted orientation determination and hence AR evaluation with unexpected error.
In this paper, an improved Hough transform using Sub Peak Tracker is developed for efficient and robust orientation detection of oriented microstructures so that accurate AR evaluation can be achieved. Experimental result shows the proposed method is a robust and accurate method for automatic
AR evaluation of 3D oriented microstructures.
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