A new 3-DOF pose precision measurement system based on linear variable differential transformer (LVDT) is developed, built and tested. The system is mainly composed of four LVDTs of symmetrical distribution, which is used to detect the pose relations between a spherical mirror and a
resonantor in an optical assembly process. Motion pose of the spherical mirror controlled by an optical assembly robot is formulated according to their geometrical relationship. A LVDT processing circuit using integrated signal conditioning chip AD598 is designed as the control system of pose
measurement. Calibration experiments illustrate that the LVDT possesses well static and dynamic characteristics. A PID algorithm is used to improve the adjusting efficiency. Experimental results show that the pose measurement system with maximum angle error of 10" and maximum distance
error of 0.5 μm can complete pose adjustment between the spherical mirror and the resonator in 25 seconds, which demonstrate the effectiveness of the proposed method for pose measurement.
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