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Ultra Low Power Solenoid MEMS Fluxgate Sensor with Amorphous Alloy Core

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A novel micromachined fluxgate sensor with integrated solenoid coils and amorphous alloy core is developed. The ultra low power consumption is achieved due to amorphous alloys ribbon materials optimized core structure and effective resistance controlling of coils. The device exhibits a power consumption of 2.4 mW, a sensitivity of 55 V/T and a linear range of –150 μT–150 μT as excitation current of 40 mA rms at 40 kHz. The noise power density is 55 nT/Hz1/2@1 Hz and the noise rms level is 235 nT in the frequency of 10 mHz–10 Hz.
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Document Type: Research Article

Publication date: 2011-10-01

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