Skip to main content

A Review on Legacy of Chemical Vapour Deposition Grown Thin Films for Solid State H2 Sensors

Buy Article:

$105.00 plus tax (Refund Policy)

Chemical Vapour Deposition (CVD) remains a key focus area for material researchers due to the excellent process controllability and the development of quality thin films produced on varieties of substrates for modern technological applications. Some modified CVD like Plasma enhanced CVD (PECVD), Atomic Layer CVD (ALCVD), Laser CVD and Metal organic CVD (MOCVD) offer the added advantages like low substrate temperature, high spatial resolution and precise doping of the samples during the deposition in addition to the high temperature stability of the films. CVD grown materials, especially oxides and other high temperature compounds are getting attention for gas sensor applications. In this review article, the hydrogen sensing performance of the CVD grown semi-conducting oxides like SnO2, ZnO, Fe2O3 and other high temperature materials like Silicon Carbide (SiC), group III-Nitrides (GaN, AlN etc.), and carbon derivatives (CNT and graphene) have been presented and discussed. The relative advantages and disadvantages of these materials for hydrogen sensors have also been discussed with an intention of predicting the possible future directions of research and development in this area.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
No Metrics


Document Type: Review Article

Publication date: 2011-10-01

More about this publication?
  • The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more