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Microhotplate-Based High-Speed Polyimide Capacitive Humidity Sensors

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Abstract:

Polyimide thin films are locally cured on a sensor chip using MEMS microhotplates as an alternative solution to the conventional thermal curing and evaluated as high-speed humidity sensor materials. The polyimide locally cured at a temperature over 350 °C for 1 hour exhibits full imidization. There is no significant difference between the polyimide thin films cured in a conventional convection oven and those cured locally on MEMS microhotplates. The locally cured polyimide humidity sensors with a micro-bridge structure created using front-side etching with XeF2 gas show a sensitivity of 0.77 pF/%RH, a hysteresis of 0.61%RH, and a response time of 2.5 s. They also exhibit a low dielectric loss. In comparison, the sensors with a conventional structure exhibit a time response of 7 s. These results indicate that the locally cured polyimide films may be used as a dielectric material in high speed humidity sensors.

Keywords: CAPACITIVE HUMIDITY SENSOR; LOCALLY CURED POLYIMIDE; MICROHOTPLATE

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/sl.2009.1102

Publication date: August 1, 2009

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