Analytical Calculation of Interaction Force Between Orthogonally Magnetized Permanent Magnets
Abstract:In an advanced micro-lithographic system, it is of critical importance that components are resiliently isolated from external vibrations. A passive/active electromagnetic device is a feasible solution to perform such vibration isolation. Within this device, passive permanent magnets provide the gravity compensation and active electromagnets accurate positioning. The focus of this article is on permanent magnet modeling, since a precise model is inevitable to achieve the high accuracy required for such application. This article describes a study on interaction force along three degrees of freedom (DoF) between permanent magnets having an unaligned magnetization direction for use in a permanent-magnet based suspension application. Feasibility of finite element modeling (FEM) and analytical modelling for such structures is discussed, implemented and verified with measurements.
Document Type: Research Article
Publication date: June 1, 2009
More about this publication?
- The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
- Editorial Board
- Information for Authors
- Subscribe to this Title
- Terms & Conditions
- Ingenta Connect is not responsible for the content or availability of external websites