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Enhancement of the Thermal Stability of NdFeB Thin Films for Micro-Electro-Mechanical Systems Applications

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The enhancement of NdFeB thin films thermal stability and magnetic properties by using of additions are investigated. The magnetic properties are improved and Curie temperature increases with 68 °C because of the stratification effect and simultaneous utilization of Nb-Cu and Co as additions. As compared to Ta/NdFeB/Ta films, the losses for Ta/[NdFeBNbCu/Co] × n/Ta films are smaller with 26% for coercivity and 4% for remanence magnetization at 150 °C. The samples aged for 100 h, exhibits the coercivity losses of about 0.8% for Ta/[NdFeBNbCu/Co] × 3/Ta films and of 1.1% for Ta/NdFeB/Ta films, whereas the remanence magnetization losses are 4.2% and 6.8%, respectively. For Ta/[NdFeBNbCu/Co] × n/Ta film, α and coefficients in the temperature range 25 °C – 150 °C are of about −0.025%/°C and −0.39%/°C, respectively, which satisfy the needs of planar permanent magnets as actuator elements for MEMS applications.


Document Type: Research Article


Publication date: 2009-06-01

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