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A Micro Electro Mechanical System Surface Ionization Source for Ion Mobility Spectrometer

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Abstract:

A surface ionization (SI) source for ion mobility spectrometer (IMS) was designed and fabricated by micro electro mechanical system (MEMS) process. The Pt film was deposited as the ionization material and the effect of the ionization temperature on the ion spectra was investigated. The ion mobility spectrometer with MEMS SI source is sensitive to low concentration of tri-ethylamine and there is a linear relationship between the square root of concentration and the area of ion peak within the testing range. The theoretical detection limit of IMS with MEMS SI source to tri-ethylamine is ∼0.06 ppm.

Keywords: ION MOBILITY SPECTROMETER; MEMS PROCESS; SURFACE IONIZATION

Document Type: Research Article

DOI: https://doi.org/10.1166/sl.2008.542

Publication date: 2008-12-01

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