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Nanorods of ZnO were growth in chemical vapor deposition (CVD) system to act as the sensing materials. The Nanorod materials were characterized by SEM and XRD techniques. The ozone sensing activities of various ZnO nanorod was studied. Nanorod showed promise as a maximum response (S = 1300) and shortest response with recovery times (Tr = 60 s, Trec = 5 s) in various ZnO nano-materials. The single crystal structure to enhance the conductivity of the material was the reason why the fast response and recovery time. The sensor response was measured from the concentration of 1 to 2.5 ppm ozone in this study.
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