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Development of Micro Scanning Multiprobes for Material Characterization

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Abstract:

This paper reports the development of micro scanning 12-point probes. The microprobes are Au-coated 1 m thick SiO2 cantilevers with sharp tips of about 100 m diameters. The lengths of probes range from 100 m to 300 m with the minimum spacing between probes being 4 m. A theoretical analysis of the relationship between the deflection of the probes and the residual stress of SiO2 is presented. A method of compensating this residual stress and making the cantilever flatter is also reported. In addition, an analytical model to calculate the maximum allowable displacement of the Au-SiO2 bimetallic cantilever has been developed and verified experimentally.

Keywords: MULTIPROBES; PROBE FABRICATION; THERMAL RESIDUAL STRESS

Document Type: Research Article

DOI: https://doi.org/10.1166/sl.2008.045

Publication date: 2008-04-01

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