Development of Micro Scanning Multiprobes for Material Characterization
Authors: Li, Y.; Zheng, Q.; Wang, Z.; Katragadda, R.; Khalid, W.; Panguluri, R. P.; Nadgorny, B.; Hoffmann, P. M.; Xu, Y.
Source: Sensor Letters, Volume 6, Number 2, April 2008 , pp. 299-304(6)
Publisher: American Scientific Publishers
Abstract:This paper reports the development of micro scanning 12-point probes. The microprobes are Au-coated 1 m thick SiO2 cantilevers with sharp tips of about 100 m diameters. The lengths of probes range from 100 m to 300 m with the minimum spacing between probes being 4 m. A theoretical analysis of the relationship between the deflection of the probes and the residual stress of SiO2 is presented. A method of compensating this residual stress and making the cantilever flatter is also reported. In addition, an analytical model to calculate the maximum allowable displacement of the Au-SiO2 bimetallic cantilever has been developed and verified experimentally.
Document Type: Research Article
Publication date: April 2008
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