Skip to main content

Fabrication of Microlens Array by Direct Hot Embossing on Silicon Substrate

Buy Article:

$113.00 plus tax (Refund Policy)


This paper introduces a new way to fabricate microlens array by direct hot embossing on silicon substrate and an in-house prototype hot embossing machine. Embossing conditions that influence the transcription accuracy, such as embossing temperature and pressure, are discussed, and the diffractive efficiency and PSF (point spread function) of the embossed microlens array are measured. The high fidelity and fine optical performance of the embossed microlens array demonstrate the accuracy of hot embossing to fabricate microlens array as well as its economy and high efficiency.


Document Type: Research Article


Publication date: April 1, 2008

More about this publication?
  • The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • Ingenta Connect is not responsible for the content or availability of external websites

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Partial Open Access Content
Partial Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more