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Fabrication of Microlens Array by Direct Hot Embossing on Silicon Substrate

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This paper introduces a new way to fabricate microlens array by direct hot embossing on silicon substrate and an in-house prototype hot embossing machine. Embossing conditions that influence the transcription accuracy, such as embossing temperature and pressure, are discussed, and the diffractive efficiency and PSF (point spread function) of the embossed microlens array are measured. The high fidelity and fine optical performance of the embossed microlens array demonstrate the accuracy of hot embossing to fabricate microlens array as well as its economy and high efficiency.
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Document Type: Research Article

Publication date: 2008-04-01

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