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On the Application of the Boltzmann Equation to the Simulation of Fluid Structure Interaction in Micro-Electro-Mechanical-Systems

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Abstract:

A three-dimensional quasi-static Stokes model, with a correction based on the kinetic theory of rarefied gas, is used to evaluate the damping forces exerted by gas flows on the moving surfaces of micromechanical structures in a wide range of pressures. Numerical results are compared with the experimental data collected on a silicon biaxial accelerometer in the continuum and transitional flow regimes. Furthermore, rarefied gas flows in ultra-thin film slider bearings are studied through a generalized Reynolds equation based on the linearized Boltzmann equation which holds for arbitrary Knudsen numbers. Since the generalized Reynolds equation is a flow rate-based model and is obtained by calculating the fundamental flows in the lubrication film (i.e., the Poiseuille and Couette flows), the plane Poiseuille-Couette flow problem between parallel plates has been preliminarly investigated. General boundary conditions of Maxwell's type have been considered by allowing for bounding surfaces with different physical properties.

Keywords: BOLTZMANN EQUATION; DAMPING; GENERALIZED REYNOLDS EQUATION; MEMS

Document Type: Research Article

DOI: https://doi.org/10.1166/sl.2008.003

Publication date: 2008-02-01

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