Efficient Generation of MEMS Reduced-Order Macromodels Using Differentiation of Finite Elements

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Abstract:

The paper demonstrates the advanced simulation methodology using differentiation of the discretized finite element equations to automatic generating reduced order macromodels of coupled micro-electro-mechanical-systems based on mode-superposition technique. In particular, the time consuming data sampling process in the static and frequency response domains has been replaced by a single finite element run on the basis of the structural, electrostatic and squeeze film analyses with regard to modal amplitudes. The idea of the approach is to compute not only the governing system matrices but also high order derivatives with regard to design parameters by means of automatic differentiation. As result, Taylor vectors of the model response can be expanded in the vicinity of the initial position with regard to physical parameters. The objective of this work is to demonstrate the viability of high order derivatives method to an efficient generation of MEMS macromodel. The approach is demonstrated by the reduced order modeling generation procedure of an electrostatically actuated micromirror.

Keywords: FINITE ELEMENT METHOD; MACROMODELING; MEMS; MODE-SUPERPOSITION TECHNIQUE

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/sl.2008.013

Publication date: February 1, 2008

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