Efficient Generation of MEMS Reduced-Order Macromodels Using Differentiation of Finite Elements
Abstract:The paper demonstrates the advanced simulation methodology using differentiation of the discretized finite element equations to automatic generating reduced order macromodels of coupled micro-electro-mechanical-systems based on mode-superposition technique. In particular, the time consuming data sampling process in the static and frequency response domains has been replaced by a single finite element run on the basis of the structural, electrostatic and squeeze film analyses with regard to modal amplitudes. The idea of the approach is to compute not only the governing system matrices but also high order derivatives with regard to design parameters by means of automatic differentiation. As result, Taylor vectors of the model response can be expanded in the vicinity of the initial position with regard to physical parameters. The objective of this work is to demonstrate the viability of high order derivatives method to an efficient generation of MEMS macromodel. The approach is demonstrated by the reduced order modeling generation procedure of an electrostatically actuated micromirror.
Document Type: Research Article
Publication date: February 1, 2008
More about this publication?
- The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
- Editorial Board
- Information for Authors
- Subscribe to this Title
- Terms & Conditions
- Ingenta Connect is not responsible for the content or availability of external websites