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Numerical Analysis of Elastomeric Fluidic Microvalves

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We present a finite element model of polydimethylsiloxane (PDMS) fluidic microvalves. A valve is fabricated by assembling two patterned layers in a two-channel crossed architecture. The valve closes as a consequence of the motion of the interlayer membrane. The membrane is deformed by the pressure of the actuation fluid, flowing in one of the two channels. By using a soft rubber material model, we setup a numerical model of the microvalve and validate it against experiments. The numerical model allows to evaluate the mechanical engagement of commonly used microvalve architectures and to analyze the performance of alternative geometries.
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Keywords: ELASTOMER; FINITE ELEMENT; FLUIDIC MICROVALVES; MULTILAYER SOFT LITHOGRAPHY

Document Type: Research Article

Publication date: 01 February 2008

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