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Numerical Simulation of Impact-Induced Rupture in Polysilicon MEMS

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The problem of impact rupture in polysilicon MEMS is addressed in this paper employing a numerical 2D geometrical model for the polycrystal obtained by means of a Voronoi tessellation coupled with a Finite Element (FE) mesh. The intergranular and transgranular rupture is modelled by means of cohesive traction-jumps softening laws; accidental drop is simulated through a simplified three-level, global–local, multi scale approach.
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Document Type: Research Article

Publication date: 2008-02-01

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