Numerical Simulation of Impact-Induced Rupture in Polysilicon MEMS

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Abstract:

The problem of impact rupture in polysilicon MEMS is addressed in this paper employing a numerical 2D geometrical model for the polycrystal obtained by means of a Voronoi tessellation coupled with a Finite Element (FE) mesh. The intergranular and transgranular rupture is modelled by means of cohesive traction-jumps softening laws; accidental drop is simulated through a simplified three-level, global–local, multi scale approach.

Keywords: ACCIDENTAL DROP; MICRO ELECTRO MECHANICAL SYSTEMS (MEMS); NUMERICAL FE SIMULATION

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/sl.2008.008

Publication date: February 1, 2008

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