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Model Order Reduction for Circuit Level Simulation of RF MEMS Frequency Selective Devices

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The development of complex radio frequency circuits with integrated micromechanical devices requires the availability of tools for predictive design, optimization and verification of the complete system. In this paper, a methodology towards this goal is proposed. It enables the extraction of non-linear low order models of vibrating micromechanical devices suitable for use in a standard circuit level simulator. The reduction of the complexity of the model is achieved by using moment matching model order reduction, together with an approximated lumped description of the electrostatic forces. In this way, both high simulation accuracy and low computational complexity are obtained.
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Keywords: CIRCUIT SIMULATION; COMPACT MODELLING; MODEL ORDER REDUCTION; RF MEMS

Document Type: Research Article

Publication date: 2008-02-01

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