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Fast Response Methane Sensor Based on Pd(Ag)/ZnO/Zn MIM Structure

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Abstract:

Metallic Zinc was deposited on thermally grown SiO2 (0.5 m thick) on p-Si 〈100〉 substrate. Nanocrystalline ZnO was deposited by sol–gel technique on Zn to form the active insulator of metal-active insulator-metal (MIM) structure. Pd–Ag (26%) metal contacts were deposited on ZnO to form other electrode of MIM structure. The IV characteristics were studied at different temperatures in air and in presence of three different concentrations (0.1%, 0.5%, and 1%) of methane gas. A shift in IV characteristics in presence of methane was observed. The sensitivity and response time were studied at different temperatures (50, 150, 200, 250, and 300 °C). 250 °C was found to be optimum temperature for maximum sensitivity of 88.6±2% and minimum time of response of 11.4 s±0.5 s. The stability of the sensor structure at 250 °C was studied for about 21 hours in a span of three days with intermittent opening of 0.1% methane gas and the MIM sensor was found to be very stable.

Keywords: CH4 SENSOR; FAST RESPONSE; HIGH SENSITIVITY; MIM; NANOCRYSTALLINE ZINC OXIDE

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/sl.2006.050

Publication date: December 1, 2006

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