Comparison of ZnO/64° LiNbO₃ and ZnO/36° LiTaO₃ Surface Acoustic Wave Devices for Sensing Applications

Authors: Kalantar-Zadeh, K.; Powell, D.A.; Sadek, A.Z.; Wlodarski, W.; Yang, Q.B.; Li, Y.X.

Source: Sensor Letters, Volume 4, Number 2, June 2006 , pp. 135-138(4)

Publisher: American Scientific Publishers

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Abstract:

The performance of ZnO/64°-YX LiNbO₃ and ZnO/36°-YX LiTaO₃ layered SAW structures was compared in terms of mass sensitivity and acoustic wave velocity. It was found that the ZnO/64° LiNbO₃ structure has a few distinct advantages over ZnO/36° LiTaO₃. For ZnO/64°LiNbO₃, the mass sensitivity is ∼2.5 times larger. Additionally, the optimum thickness of the ZnO guiding layer is approximately half that of the ZnO/36° LiTaO₃ structure, which reduces the cost of fabrication.

Keywords: 64DEG LINBO3; 36DEG LITAO3; ZNO; LAYERED SAW; MASS SENSING

Document Type: Research article

DOI: http://dx.doi.org/10.1166/sl.2006.015

Publication date: 2006-06-01

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The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
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