If you are experiencing problems downloading PDF or HTML fulltext, our helpdesk recommend clearing your browser cache and trying again. If you need help in clearing your cache, please click here . Still need help? Email help@ingentaconnect.com

Front-to-Back Alignment Techniques in Microelectronics/MEMS Fabrication: A Review

$113.00 plus tax (Refund Policy)

Buy Article:

Abstract:

The front-to-back alignment technique in photolithography process is often required for registering mutually aligned patterns on both the sides of the wafer in the fabrication process of power devices such as power transistors and various kinds of microelectromechanical systems (MEMS) based devices such as RFMEMS components, mechanical sensors, bio/chemical sensors, microcalorimeters, and microfluidic devices etc. This paper reviews the progress made in the front-to-back alignment techniques in semiconductor processing for the realization of microstructures for MEMS and other microelectronics devices. Various techniques, which are used in commercial front-to-back mask aligners, are discussed in detail. Some other alternative methods, which use the conventional contact/proximity single sided mask aligner for defining the mutually aligned patterns on both the sides of the wafers, are also covered in this review. The principle and approach of various front-to-back alignment techniques have been presented. The alignment accuracy and the source of errors have been discussed. A list of the references which incorporate front-to-back alignment methods for the development of MEMS/microelectronics devices such as, mechanical sensors, bio/chemical sensors, microcalorimeters, RFMEMS components, microfluidic devices, power transistors is also included.

Keywords: FRONT-TO-BACK ALIGNMENT; LITHOGRAPHY; MASK ALIGNER; MECHANICAL JIG AND PROJECTOR; MEMS

Document Type: Review Article

DOI: http://dx.doi.org/10.1166/sl.2006.007

Publication date: March 1, 2006

More about this publication?
  • The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Terms & Conditions
  • ingentaconnect is not responsible for the content or availability of external websites
Related content

Tools

Favourites

Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more