Comparison of Conductometric Gas Sensitivity of Surface Acoustic Wave Modes in Layered Structures

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Abstract:

Properties of propagation modes for a layered ZnO/XZ LiNbO3 surface acoustic wave sensor have been investigated both theoretically and experimentally. By calculating the effective permittivity func- tion, it was shown that after the ZnO deposition two distinct propagation modes have been generated: a Rayleigh and a shear horizontal. A layer of InOx was deposited to provide a conductometric sensing mechanism to NO2. It was found that the sensor is at least one order of magnitude more sensitive when operating in Rayleigh mode than in the shear horizontal mode. This sensitivity was found to be in good agreement with calculations for low concentrations of NO2, however discrepancies were observed for higher concentrations.

Keywords: CONDUCTOMETRIC; INOX; LAYERED; NO2; SAW GAS SENSOR; ZNO

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/sl.2005.011

Publication date: January 1, 2005

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