Comparison of Conductometric Gas Sensitivity of Surface Acoustic Wave Modes in Layered Structures

Authors: Powell, David A.; Kalantar-Zadeh, Kourosh; Ippolito, Samuel; Wlodarski, Wojtek

Source: Sensor Letters, Volume 3, Numbers 1-4, January 2005 , pp. 66-70(5)

Publisher: American Scientific Publishers

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Abstract:

Properties of propagation modes for a layered ZnO/XZ LiNbO₃ surface acoustic wave sensor have been investigated both theoretically and experimentally. By calculating the effective permittivity func- tion, it was shown that after the ZnO deposition two distinct propagation modes have been generated: a Rayleigh and a shear horizontal. A layer of InO_x was deposited to provide a conductometric sensing mechanism to NO₂. It was found that the sensor is at least one order of magnitude more sensitive when operating in Rayleigh mode than in the shear horizontal mode. This sensitivity was found to be in good agreement with calculations for low concentrations of NO₂, however discrepancies were observed for higher concentrations.

Keywords: SAW GAS SENSOR; LAYERED; CONDUCTOMETRIC; ZNO; INOX; NO2

Document Type: Research article

DOI: http://dx.doi.org/10.1166/sl.2005.011

Publication date: 2005-01-01

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