Humidity Sensors: A Review of Materials and Mechanisms

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We have reviewed humidity sensors based on various materials for both relative and absolute humidity, including ceramic, semiconducting, and polymer materials. In the majority of publications, there are few papers dealing with absolute humidity sensors, which have extensive applications in industry. We reviewed extensively absolute humidity sensors in this article, which is unique comparing with other reviews of humidity sensors. The electrical properties of humidity sensors such as sensitivity, response time, and stability have been described in details for various materials and a considerable part of the review is focused on the sensing mechanisms. In addition, preparation and characterization of sensing materials are also described. For absolute humidity sensors, mirror-based dew-point sensors and solid-state Al2O3 moisture sensors have been described. As the major problem in Al2O3 moisture sensors, long-term instability, has been solved, α-Al2O3 moisture sensors may have promising future in industry.


Document Type: Review Article


Publication date: December 1, 2005

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  • The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
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