Pd/TiO_x/Ti–Au (x < 2) Metal-Active Insulator-Metal (MIM) Hydrogen Gas Sensor at Elevated Temperatures

Authors: Hazra, S.K.; Basu, S.

Source: Sensor Letters, Volume 3, Number 2, June 2005 , pp. 179-182(4)

Publisher: American Scientific Publishers

Buy & download fulltext article:

Price: $113.00 plus tax (Refund Policy)

Abstract:

Al doped polycrystalline titanium dioxide was grown by thermal oxidation at 800 °C on 0.25 mm thick titanium substrates with gold coating on the back surface. Resistivity, carrier density and mobility were measured at room temperature. The grown oxide showed n -type conductivity. Pd metal dots (1.5 mm dia) were deposited on the oxide surface to fabricate Pd/TiO_x/Ti–Au (x < 2) MIM sensor structure. The I–V study was carried out with 500 ppm hydrogen in the temperature range 200–350 °C and the current increased upon exposure to hydrogen. The sensitivity and the change in barrier height were calculated and were found to maximize at 300 °C beyond which the values started decreasing. The response time as calculated from the transient response characteristics was 16 sec at 300 °C.

Keywords: TIOX; MIM; HYDROGEN SENSOR

Document Type: Research article

DOI: http://dx.doi.org/10.1166/sl.2005.015

Publication date: 2005-06-01

More about this publication?

The growing interest and activity in the field of sensor technologies requires a forum for rapid dissemination of important results: Sensor Letters is that forum. Sensor Letters offers scientists, engineers and medical experts timely, peer-reviewed research on sensor science and technology of the highest quality. Sensor Letters publish original rapid communications, full papers and timely state-of-the-art reviews encompassing the fundamental and applied research on sensor science and technology in all fields of science, engineering, and medicine. Highest priority will be given to short communications reporting important new scientific and technological findings.
Editorial Board
Information for Authors
Subscribe to this Title
Terms & Conditions
ingentaconnect is not responsible for the content or availability of external websites