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Response Signatures for Nanostructured, Optically-Probed, Functionalized Microcantilever Sensing Arrays

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Recently, there has been an increasing demand to perform real-time in-situ chemical detection of haz- ardous materials. In the present studies, we have developed microcantilevers (MCs), nanostructured on one side and configured in spatially-dense arrays, for the sensitive detection of organic vapor mix- tures. MCs singularly coated with seven different molecular recognition phases (MRPs) exhibit differen- tial selectivity and response. The phases are films of nanodimensional thickness which are deposited by physical vapor deposition (PVD) method and have been structurally characterized post deposition. Analyte-induced bending of the MCs in arrays is monitored using beam displacements of vertical cav- ity surface emitting lasers using a time multiplexing scheme. The magnitudes and shapes of the array response profiles are unique to the analytes tested. Also, larger responses to the analytes are realized with increasing layer thickness.


Document Type: Research Article


Publication date: 2004-09-01

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