Recently, there has been an increasing demand to perform real-time in-situ chemical detection of haz- ardous materials. In the present studies, we have developed microcantilevers (MCs), nanostructured on one side and configured in spatially-dense arrays, for the sensitive detection of organic vapor mix- tures. MCs singularly coated with seven different molecular recognition phases (MRPs) exhibit differen- tial selectivity and response. The phases are films of nanodimensional thickness which are deposited by physical vapor deposition (PVD) method and have been structurally characterized post deposition. Analyte-induced bending of the MCs in arrays is monitored using beam displacements of vertical cav- ity surface emitting lasers using a time multiplexing scheme. The magnitudes and shapes of the array response profiles are unique to the analytes tested. Also, larger responses to the analytes are realized with increasing layer thickness.
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