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Residual Stress Relief in Al2O3–Poly-Tetra-Fluoro-Ethylene Hybrid Thick Films for Integrated Substrates Using Aerosol Deposition

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Abstract:

Low temperature fabrication of Al2O3-based polymer composite thick films was performed for integrated substrate applications using the aerosol deposition (AD) process. Although AD is capable of fabricating dense ceramic films at room temperature, residual stress occurs in the deposited ceramic films due to the nature of the film growth, which is based on solidification through the impact and fracture of a starting powder. In order to solve this problem, we obtain residual stress relief by adding poly-tetra-fluoro-ethylene (PTFE), which has superior elongation and dielectric properties when used as an electronic substrate. The Al2O3–PTFE composite thick films were deposited by the AD method on copper foil substrates using a mixed starting powder at room temperature. The size of the Al2O3 crystallites in the Al2O3–PTFE composite thick films was 10 times larger than the crystallites in the Al2O3 thick films due to the cushioning effect of the soft PTFE. The Al2O3–PTFE composite thick films had a low dielectric constant (∼4.5) and loss tangent (∼0.002), and electrical properties that were nearly frequency independent after a low temperature annealing at below 300 °C. In addition, the Al2O3–PTFE composite thick films showed a superior chemical resistance during the patterning process due to the extraordinarily high chemical resistance of the PTFE.

Keywords: AEROSOL DEPOSITION; AL2O3; INTEGRATED; POLYMER COMPOSITE; PTFE; RESIDUAL STRESS; SUBSTRATE

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jno.2012.1305

Publication date: June 1, 2012

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  • Journal of Nanoelectronics and Optoelectronics (JNO) is an international and cross-disciplinary peer reviewed journal to consolidate emerging experimental and theoretical research activities in the areas of nanoscale electronic and optoelectronic materials and devices into a single and unique reference source. JNO aims to facilitate the dissemination of interdisciplinary research results in the inter-related and converging fields of nanoelectronics and optoelectronics.
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