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Synthesis of Nano-Structured Sb2Te3 Thin Films by Stacked Elemental Layer Method

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Abstract:

Nanostructured Sb2Te3 thin films were synthesized by stacking the elemental layer which is allowed to isochronal annealing at various temperatures in the presence of Ar atmosphere. X-ray Diffraction (XRD) results confirm the presence of dominated (015) and (107) oriented hexagonal phase at above 350 °C. The crystallite size of about 58 nm of the annealed film was calculated from the XRD spectra. The XRD result shows the growth of H (105) oriented Sb2Te3 thin films at this temperature region. The transmission spectra indicate good optical behavior of the annealed stack. The observed bandgap was between 2 and 2.5 eV. The resistivity of the annealed stack reveals the semiconductor behavior and also low resistance. Field Emission Scanning Electron Microscope (FESEM) images show that the deposit was composed of nano pillar like structure with the size of about 70 nm and uniform film thickness. Atomic Force Microscope (AFM) images also depicted the presence of nano size particles in Sb2Te3 thin film and uniform surface morphology with roughness of about 38 nm. The particle size of about 60 nm could also be observed from AFM analysis. From the observed results, it is suggested that the synthesis of nano structured Sb2Te3 thin film could be produced by using the Stacked Elemental Layer (SEL) method.

Keywords: ELEMENTAL LAYER DEPOSITION; NANO STRUCTURED MATERIAL; SB2TE3; STRUCTURAL PROPERTIES; SURFACE MORPHOLOGY; THIN FILMS

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jno.2010.1115

Publication date: December 1, 2010

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  • Journal of Nanoelectronics and Optoelectronics (JNO) is an international and cross-disciplinary peer reviewed journal to consolidate emerging experimental and theoretical research activities in the areas of nanoscale electronic and optoelectronic materials and devices into a single and unique reference source. JNO aims to facilitate the dissemination of interdisciplinary research results in the inter-related and converging fields of nanoelectronics and optoelectronics.
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