Skip to main content

Nanoscale Field-Effect Transistor Based on Layer-by-Layer Self-Assembled Nanoparticle Thin Films

Buy Article:

$113.00 plus tax (Refund Policy)

Abstract:

In this paper, the fabrication and characterization of nanoscale field-effect transistors based on layer-by-layer nano self-assembly technique is introduced. The indium oxide nanoparticle thin film works as the channel material, while the silicon dioxide nanoparticle thin film serves as the gate dielectric material. Electron-beam lithography is used to pattern the source/drain electrode, and results in the channel length at 25 nm. The field-effect transistors operate at a linear region, with a mobility of 0.928 cm2/Vs, and an on/off ratio of 1.32 × 105. The nanoscale field-effect transistor described in this paper is a demonstration of an inexpensive approach to fabricate nanoscale transistors and integrated circuits based on the low-cost and promising layer-by-layer nano self-assembly.

Keywords: NANOPARTICLE; NANOSCALE; SELF-ASSEMBLY; TRANSISTOR

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jno.2006.206

Publication date: August 1, 2006

More about this publication?
  • Journal of Nanoelectronics and Optoelectronics (JNO) is an international and cross-disciplinary peer reviewed journal to consolidate emerging experimental and theoretical research activities in the areas of nanoscale electronic and optoelectronic materials and devices into a single and unique reference source. JNO aims to facilitate the dissemination of interdisciplinary research results in the inter-related and converging fields of nanoelectronics and optoelectronics.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • ingentaconnect is not responsible for the content or availability of external websites
asp/jno/2006/00000001/00000002/art00006
dcterms_title,dcterms_description,pub_keyword
6
5
20
40
5

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
X
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more