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Effects of Coating Materials on Two Dimensional Stress-Induced Deflection of Nanomechanical Sensors

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Nanomechanical sensors, which have been expected as a promising platform for various applications, will not generate any measureable signal without an appropriate coating (receptor) layer. In spite of this critical dependence on the coating layer, there is almost no guideline for the optimization of these layers in terms of their material properties; such as, Young's modulus, Poisson's ratio, and geometrical parameters. In the present study, the effects of coating layer thickness [3 nm∼10 μm], Young's modulus [100 Pa∼1 TPa], and Poisson's ratio [0.10∼0.45] are investigated with the finite element analysis (FEA), focusing on systems with two dimensional (2D) stress induced either on top of the coating layer (i.e., surface stress) or at the interface between the coating layer and the silicon cantilever. It is found that the coating layer can either enhance or reduce the deflection of nanomechanical sensors depending on its material properties. These results provide guidelines for designing a coating layer to achieve higher sensitivity.
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Document Type: Research Article

Publication date: 01 April 2014

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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