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Effect of Gas Phase Composition Cycling On/Off Modulation Numbers of C2H2/SF6 Flows on the Formation of Geometrically Controlled Carbon Coils

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Abstract:

Carbon coils can be synthesized using C2H2/H2 as source gases and SF6 as an incorporated additive gas under a thermal chemical vapor deposition system. In this study, nickel catalyst layer deposition and then hydrogen plasma pretreatment were performed prior to the carbon coils deposition reaction. To obtain geometrically controlled carbon coils, source gases and SF6 were manipulated as the cycling on/off modulation numbers of C2H2/SF6 flows. The cycling numbers were varied according to the different reaction processes. The increased cycling numbers could develop the wave-like nano-sized carbon coils. By further increasing the cycling numbers, however, the nanostructured carbon coils seemed to deteriorate. As a result, the maximum formation of geometrically controlled carbon coils was achieved by adjusting the cycling numbers. The enhanced etching capability of the fluorine-related species in SF6 additive gas was considered for the main objective of controlling the geometry of carbon coils.

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2012.6342

Publication date: 2012-07-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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