Provider: Ingenta Connect Database: Ingenta Connect Content: application/x-research-info-systems TY - ABST AU - Kim, Jin-Sung AU - Seo, Min-Woo AU - Ahn, Kwang-Soon AU - Choi, Chel-Jong TI - Reflow of Phosphorous Silicate Glass Layer Formed on Textured Si Surface in Crystalline Si Solar Cells JO - Journal of Nanoscience and Nanotechnology PY - 2012-07-01T00:00:00/// VL - 12 IS - 7 SP - 5700 EP - 5703 N2 - We have investigated the reflow behavior of phosphorus silicate glass (PSG) layer formed on textured Si surface using transmission electron microscopy and simulation. For conventional wet oxidation process, stress-dependent surface reaction and stress-dependent oxidant diffusion led to the oxidation retardation in both convex and concave regions of the textured Si surface, respectively. However, PSG film formed by POCl3-diffusion underwent reflow, resulting in the formations of thinner and thicker PSG films in convex and concave regions, respectively. Simulation results showed that the reflow of PSG films causes lateral thermal mismatch stresses to increase and decrease in convex and concave regions, respectively. UR - https://www.ingentaconnect.com/content/asp/jnn/2012/00000012/00000007/art00106 M3 - doi:10.1166/jnn.2012.6403 UR - https://doi.org/10.1166/jnn.2012.6403 ER -