Reflow of Phosphorous Silicate Glass Layer Formed on Textured Si Surface in Crystalline Si Solar Cells

Authors: Kim, Jin-Sung; Seo, Min-Woo; Ahn, Kwang-Soon; Choi, Chel-Jong

Source: Journal of Nanoscience and Nanotechnology, Volume 12, Number 7, July 2012 , pp. 5700-5703(4)

Publisher: American Scientific Publishers

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Abstract:

We have investigated the reflow behavior of phosphorus silicate glass (PSG) layer formed on textured Si surface using transmission electron microscopy and simulation. For conventional wet oxidation process, stress-dependent surface reaction and stress-dependent oxidant diffusion led to the oxidation retardation in both convex and concave regions of the textured Si surface, respectively. However, PSG film formed by POCl₃-diffusion underwent reflow, resulting in the formations of thinner and thicker PSG films in convex and concave regions, respectively. Simulation results showed that the reflow of PSG films causes lateral thermal mismatch stresses to increase and decrease in convex and concave regions, respectively.

Document Type: Research article

DOI: http://dx.doi.org/10.1166/jnn.2012.6403

Publication date: 2012-07-01

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