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High Efficiency GaN-Based Light Emitting Diode with Nano-Patterned ZnO Surface Fabricated by Wet Process

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The improvement of the optical output power of GaN-based light emitting diodes (LEDs) was achieved by a novel bi-layer transparent top electrode scheme. The proposed bi-layer structure is composed of a Ga-doped ZnO layer with nano-patterns obtained solely by wet etching process and an Indium Tin Oxide p-type transparent conducting electrode layer. We employed various wet-etching conditions to maximize light extraction efficiency and it was observed that the crystal morphologies of nano-patterns and optoelectronic properties are dependent on etching duration. Because of ITO under GZO layer, the current spreading was not affected even after formation of nano-patterned surface on the GZO layer by wet etching. Consequently, an enhancement of as high as 43.1% in optical output power at an injection current of 100 mA for the LED with nano-patterns wet-etched by 0.025% HCl for 30 seconds was realized without significant degradation in electrical property when compared to a reference LED.

Document Type: Research Article


Publication date: 2012-07-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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