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A Simulation Model Considering Sidewall Deposition for the Precise Prediction of the Performance of Label-Free Photonic-Crystal Biosensors

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Photonic-crystal (PC) structures are used as biosensors that detect the changes in the surrounding refractive index due to biomolecular interactions. In this study, a method of modeling a PC structure that considers the sidewall deposition effect during high-index layer deposition was proposed to precisely predict the performance of a label-free PC biosensor. A PC composed of nanoreplicated grating and a TiO2 high-index layer was fabricated. To replicate nanograting, a silicon mold with a 450 nm pitch and a 100 nm grating height was fabricated via photolithography and reactive ion etching. A mold cavity was coated with a self-assembled monolayer, and UV replication was performed. To realize the PC structure, a TiO2 high-index layer was deposited using the E-beam evaporation system. To design the simulation model considering the sidewall deposition effect, the cross-sectional surface profile of each PC layer was measured. Finally, the changes in the transmission spectrum of the fabricated PC structure with different buffer solutions were measured and compared with the simulated results obtained from rigorous coupled wave analysis to examine the prediction accuracy of the proposed simulation model.

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2012.6366

Publication date: July 1, 2012

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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