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Synthesis of TaZnO Thin Films Using Combinatorial Magnetron Sputtering and Its Electrical, Structural and Optical Properties

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The structural, electrical, and optical properties of tantalium zinc oxide (TaZnO) thin films grown using combinatorial magnetron sputtering system were investigated. To explore the effects of film thickness and post annealing treatment on the properties of the films, we have fabricated TaZnO sample libraries having different thicknesses and carried out post annealing treatment. Sample libraries fabricated at room temperature showed the resistivity ranged 2.1∼ 7.1x 10−3 Ωcm, while the films post annealed at 200 °C under 1 mTorr exhibited the resistivity as low as 1.2x10−3 Ω cm. XRD measurements revealed that the film structure was strongly depended on the film thickness, showing that the structure was changed from amorphous to polycrystalline with increasing the film thickness. Furthermore, it was found that figure of merit (ØTC), which was determined by T% and Rs of the TaZnO films, showed maximum value as the films with a thickness of 230 nm was postannealed at 200 °C under vacuum of 1 mTorr.

Document Type: Research Article


Publication date: 2012-07-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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