Authors: Choi, Kee-Bong; Lee, Jae Jong; Kim, Gee Hong; Lim, Hyung Jun

Source: Journal of Nanoscience and Nanotechnology, Volume 12, Number 7, July 2012 , pp. 5245-5251(7)

Publisher: American Scientific Publishers

Abstract:

This paper presents a piezo-driven compliant stage for nano positioning with two degree-of-freedom parallel linear motions. Nano positioning is one of the most important factors in completion of nanotechnologies. It can be accomplished by flexure-based compliant stages driven by piezo-actuators. For compact configuration, the compliant stage is stacked by two-layered compliant mechanisms. The upper layer contains a motion guide mechanism, and the lower layer two displacement amplification mechanisms. The motion guide mechanism consists of four prismatic-prismatic parallel compliant joint chains for two translational motion guides. The displacement amplification mechanism is adopted by a flexure-based flextensional amplification mechanism driven by a stack-type piezo actuator. Due to the parallel compliant joint chains, the stage has the same dynamics in the x and y axes. In this study, through design and analysis, the mechanisms were machined via wire electro-discharge machining and are were then integrated with two stack-type piezoelectric elements for actuation, and two capacitive sensors for ultra-precision displacement measurement. Finally, experiments were carried out to demonstrate the performance of the compliant stage.

Document Type: Research article

DOI: http://dx.doi.org/10.1166/jnn.2012.6262

Publication date: 2012-07-01

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• Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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