A Micro-System Based on Glass-Nanoporous Silicon for Optical Sensing of Organic Solvent Vapor
Abstract:We present a recent experimental study on the application of nanoporous silicon (np-Si) to an optical vapor sensor. We fabricated the micro-system based on a glass-nanoporous silicon layer on a p +-type silicon wafer. To check the selectivity and sensitivity of the np-Si layer to organic vapors, we prepared three types of np-Si layer samples—a single layer, distributed Bragg reflector (DBR) layer, and microcavity layer—and investigated its reflectance spectra upon exposure to different concentrations of various organic vapors. When the np-Si layer samples were exposed to the organic vapors, a red-shift occurred in the reflectance spectrum, and we determined that this red-shift can be attributed to the changes in the refractive index induced by the capillary condensation of the organic vapor within the pores of the np-Si layer. The np-Si layer samples showed excellent sensing ability to different types and concentrations of organic vapors. After removing the organic vapors, the reflectance spectrum immediately returned to its original state.
Document Type: Research Article
Publication date: 2012-06-01
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