Effects of a PbTiO3 Insertion Layer on the Morphological and Electromechanical Characteristics of Sol–Gel-Driven 0.2PZN–0.8PZT Piezoelectric Films for Energy Harvesters
Abstract:This study investigated the morphological and electromechanical characteristics of 0.2PZN–0.8PZT films fabricated using a PbTiO3 layer. Crack-free 1-μm-thick films with a pure perovskite phase were obtained on Pt/Ti/SiO2/Si substrates using a modified sol–gel deposition method. A highly dense and smooth morphology and a high piezoelectric coefficient (d 33) of 230 pC/N were observed in a 0.2PZN–0.8PZT film with a PbTiO3 insertion layer after annealing at 750 °C. The as-produced sol–gel-driven 0.2PZN–0.8PZT thin films are attractive for application to piezoelectrically operated microelectronic actuators, sensors, or energy harvesters due to their low facility cost, smooth surface, and excellent electromechanical characteristics.
Document Type: Research Article
Publication date: 2012-04-01
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