We report a facile solution-based method for the controlled growth of ZnO nanomaterials on an AIN/Si substrate. A ZnO buffer layer was coated on the substrate before growing the ZnO nanomaterials. The shape of the ZnO nanomaterials changed from nanosheet to nanorod as the thickness
of the ZnO buffer layer increased. Doping of the buffer layer with Ga decreased the average grain size of the ZnO buffer layer, which resulted in the growth of longer and thinner ZnO nanorods on the buffer layer. The UV sensing results of the ZnO nanorod-based device revealed that the aspect
ratio of the ZnO nanorods is crucial for enhancing the performance of the device.
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