Effect of Flash Lamp Annealing and Laser Spike Annealing on Random Dopant Fluctuation of 15-nm Metal-Oxide-Semiconductor Devices
Abstract:Comparison of two different implantation processing techniques for random dopant (RD)-induced threshold voltage fluctuation (σV th) in 15-nm metal-oxide-semiconductor (MOS) devices is reported. Implantations of flash lamp annealing and laser spike annealing are simulated using a kinetic Monte Carlo (KMC) technique. The KMC generated distributions are mapped into device channel for three-dimensional quantum mechanical transport simulation to estimate threshold voltage fluctuation. The main results of this study show that the laser spike annealing could achieve 30% reduction of RDF-induced σV th for low-power application of 15-nm MOS devices, compared with flash lamp annealing.
Document Type: Research Article
Publication date: March 1, 2012
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