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Effects of Reduced Chemical Vapor Deposition Environment on Growth and Optical Characteristics of TiO2 Nanobelts

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TiO2−δ nanobelts were self-catalytically grown at 510 °C on bare Si (100) substrates using metallorganic chemical vapor deposition. The nanobelt formation was critically affected by the partial pressure of oxygen. The nanobelts were grown when supplying only Ar or a mixed gas of Ar (90%) and H2 (10%), while thin films were formed with an O2 gas flow of more than 50 cm3 min−1. The nanobelts consisted of ∼20–30 nm size rutile-dominant nanocrystallites. A vapor-solid growth mechanism excluding a liquid phase appeared to control the nanobelt formation. The grown TiO2−δ nanobelts showed a strong photoluminescence (PL) spectra peak at ∼550 nm due to oxygen vacancies. The nanobelt surface possessed significant amount of oxygen vacancies contributing PL and actively reacting with the environment, indicating promise for photocatalytic and gas sensor applications in a visible light regime.
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Keywords: MOCVD; NANOBELTS; PHOTOTOLUMINESCENCE; TIO2

Document Type: Research Article

Publication date: 2012-02-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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