Study on the Micro-Heater Geometry in In2O3 Micro Electro Mechanical Systems Gas Sensor Platforms and Effects on NO2 Gas Detecting Performances

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Abstract:

Micro electro mechanical systems (MEMS) platforms for gas sensing devices with the co-planar type micro-heaters were designed, fabricated and its effects on the In2O3 gas sensors were investigated. Micro-heaters in MEMS gas sensor platforms were designed in the four-type heater patterns with different geometries. Electro-thermal characterizations showed that the designed platforms had highly thermal efficiency because the micro hot-plate structures were formed in the diaphragm and the thermal efficiencies were analyzed for all of 16 models and compared with each other, respectively. The designed micro-platforms were fabricated by MEMS process, and Indium oxide (In2O3) nanoparticles were synthesized by sol–gel process and dropped on the MEMS platforms for detecting the noxious oxide gas (NO2) Fabricated micro-platforms had a very low power consumption in the fabricated 16-type models, especially, the minimum power consumption was 41 mW at the operating temperature of 250 °C. After experiments on gas sensing characteristics to NO2 gases, fabricated In2O3 gas sensors had almost the same gas sensitivity (RS ) at the operation temperature of 250 °C. It is concluded that the micro-heater geometries, pattern shapes and sizes, can be influential on the power consumption of the devices and its gas sensing characteristics.

Keywords: GAS SENSITIVITY; GAS SENSOR; MEMS; MICRO-HEATER; POWER CONSUMPTION

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2012.4619

Publication date: February 1, 2012

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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