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Fabrication of Metallic Nanostructures of Sub-20 nm with an Optimized Process of E-Beam Lithography and Lift-Off

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Abstract:

A process consisting of e-beam lithography and lift-off was optimized to fabricate metallic nanostructures. This optimized process successfully produced gold and aluminum nanostructures with features size less than 20 nm. These structures range from simple parallel lines to complex photonic structures. Optical properties of gold split ring resonators (SRRs) were characterized with Raman spectroscopy. Surface-Enhanced Raman Scattering (SERS) on SRRs was observed with 4-mercaptopyridine (4-MPy) as molecular probe and greatly enhanced Raman scattering was observed.

Keywords: E-BEAM LITHOGRAPHY; LIFT-OFF; METALLIC NANOSTRUCTURE; SURFACE ENHANCED RAMAN SCATTERING (SERS)

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2012.5382

Publication date: January 1, 2012

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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