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Influence of Substrates on the Formation of the TiSi Nanowire by Atmosphere Pressure Chemical Vapor Deposition

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TiSi nanowires were deposited on both Si(111) and glass substrates by using SiH4, TiCl4 and N2 as the Si, Ti precursors and diluted gas respectively through atmosphere pressure chemical vapor deposition (APCVD) method. Effects of the substrates on formation of the nanowires were investigated. The results show that the nanowires can be formed on both Si(111) and glass substrates at ratio of SiH4/TiCl4 of 4. However, the quantities of the TiSi nanowires that formed with glass substrate are less than that with Si(111) substrate. The nanowires formed with glass substrate has length of 2∼3 μm and diameters of 15∼25 nm while that is 4∼5 μm and 25∼35 nm respectively with Si(111) substrate. Great quantities of the titanium silicide nanowires with relative higher contents of the C54 TiSi2 crystalline phase underneath can be obtained through improving the deposition conditions.
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Document Type: Research Article

Publication date: 2011-12-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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