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Investigation of Inner Surface of Silicon Microchannels Fabricated by Electrochemical Method

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Abstract:

Various silicon-based microchannels with different internal surface morphologies were investigated to improve the growth of carbon nanotubes on the inner surface of the pore wall. The morphology of the samples prepared under different conditions was characterized by scanning electron microscopy. Parameters such as concentration of hydrofluoric acid, potential, current density, temperature and so on were found to affect the inner surface of the pore wall. Experiments showed that certain etchant concentration, current density and temperature were important to the fabrication of samples with the regular structure and good morphology. By considering these factors, samples with the proper internal pore surface could be fabricated. Nickel was adopted as the metallic catalyst during electroless deposition onto the surface of the pore wall and bottom. The nickel/silicon microchannels were characterized and found to be suitable for the fabrication of carbon nanotubes by thermal chemical vapor deposition.

Keywords: CARBON NANOTUBES; ELECTRON EMISSION; MICROCHANNELS; SILICON-BASED; SURFACE MORPHOLOGY

Document Type: Research Article

DOI: http://dx.doi.org/10.1166/jnn.2011.4035

Publication date: December 1, 2011

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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