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Estimation of AFM Tip Shape and Status in Linewidth and Profile Measurement

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Abstract:

An atomic force microscopy image is a dilation of the specimen surface with the probe tip. Tips wear or are damaged as they are used. And AFM tip shape and position status make AFM images distorted. So it is necessary to characterize AFM tip shape and position parameters so as to reconstruct AFM images. A geometric model-based approach is presented to estimate AFM tip shape and position status by AFM images of test specimens and scanning electron microscope (SEM) images of AFM tip. In this model, the AFM tip is characterized by using a dynamic cone model. The geometric relationship between AFM tip and the sample structure is revealed in linewidth and profile measurement. The method can easily calculate the tip parameters including half-cone angle, installation angle, scanning tilting angle and curvature radius, and easily estimate the position status of AFM tip when AFM tip moves on the specimen. The results of linewidth and profile measurement are amended accurately through this approach.

Keywords: ATOMIC FORCE MICROSCOPY (AFM); LINEWIDTH AND PROFILE MEASUREMENT; SCANNING ELECTRON MICROSCOPE (SEM); TIP CHARACTERIZATION

Document Type: Research Article

DOI: https://doi.org/10.1166/jnn.2011.4032

Publication date: 2011-12-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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