Investigation Based on Nano-Electromechanical System Double Si3N4 Resonant Beam Pressure Sensor
Authors: Yang, Chuan; Guo, Can; Yuan, Xiaowei
Source: Journal of Nanoscience and Nanotechnology, Volume 11, Number 12, December 2011 , pp. 10854-10858(5)
Publisher: American Scientific Publishers
Abstract:This paper presents a type of NEMS (Nano-Electromechanical System) double Si3N4resonant beams pressure sensor. The mathematical models are established in allusion to the Si3N4 resonant beams and pressure sensitive diaphragm. The distribution state of stress has been analyzed theoretically based on the mathematical model of pressure sensitive diaphragm; from the analysis result, the position of the Si3N4 resonant beams above the pressure sensitive diaphragm was optimized and then the dominance observed after the double resonant beams are adopted is illustrated. From the analysis result, the position of the Si3N4 resonant beams above the pressure sensitive diaphragm is optimized, illustrating advantages in the adoption of double resonant beams. The capability of the optimized sensor was generally analyzed using the ANSYS software of finite element analysis. The range of measured pressure is 0∼400 Kpa, the coefficient of linearity correlation is 0.99346, and the sensitivity of the sensor is 498.24 Hz/Kpa, higher than the traditional sensors. Finally the processing techniques of the sensor chip have been designed with sample being successfully processed.
Document Type: Research Article
Publication date: December 1, 2011
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