Polymer-Assisted Deposition of Co-Doped Zinc Oxide Thin Films for the Detection of Aromatic Organic Compounds
Abstract:Co-doped Zinc oxide thin films are deposited onto SiO2/Si substrate by polymer-assisted deposition method. The surface morphology, structures and chemical states of the thin films are examined by scanning electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy. The gas-sensing properties of the thin films upon exposure to aromatic organic compound vapors are also investigated. Co-doping is shown to be very effective in enhancing the response of ZnO thin film to aromatic organic compound.
Document Type: Research Article
Publication date: December 1, 2011
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