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Temperature Control of Microheaters for Localized Carbon Nanotube Synthesis

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The temperatures of microheater devices for the localized growth of carbon nanotubes (CNTs) were brought under control to a great extent by providing the appropriate electric load (direct current or voltage) to the microheater circuit. The electrical-thermal coupled field simulations show that high temperatures only appear in very local areas under certain electric load. The infrared image of the produced microheater device agrees well with the simulation results. By applying the selected current to the fabricated microheater device and providing the mixed reaction gases, long, dense, and vertically well aligned CNT bundles were successfully grown very locally on the substrate. The control of temperatures paves the way to the localized growth of CNTs with good compatibility with CMOS process, and thus facilitating the direct integration of CNTs into future micro/nano electronics as interconnects. What's more, the method will also excite more in depth investigations on the applications of microheaters in many other fields.


Document Type: Research Article


Publication date: 2011-12-01

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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