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Microdiaphragm Resonating Biosensors in Higher Frequency Modes

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Influences of different vibration modes of microdiaphragm resonating biosensors on their detecting capability are investigated in this paper. In order to study the mass sensing capability of the sensor, gold layers with different thicknesses are deposited on the sensor's surface. The frequency shift due to this mass deposition in different frequency modes is measured. An increase in the sensitivity and the quality factor (Q-factor) is found with the increase in the vibration mode number of the sensor. The experimental results demonstrate that the mass sensitivity and quality factor of the device are 4.08 Hz/ng and 241.80 at the ninth mode. These are 2.76 and 10.26 times higher than the mass sensitivity and the Q-factor of the device at the first mode. The observations lead to this conclusion that the sensitivity of microdiaphragm resonating biosensors can be increased by working in higher modes without changing their physical parameters.


Document Type: Research Article


Publication date: December 1, 2011

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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